Silicon Anodization as a Structuring Technique
Literature Review, Modeling and Experiments
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Product details:
- Edition number 1st ed. 2018
- Publisher Springer Fachmedien Wiesbaden
- Date of Publication 22 September 2017
- Number of Volumes 1 pieces, Book
- ISBN 9783658192372
- Binding Paperback
- No. of pages316 pages
- Size 210x148 mm
- Weight 4497 g
- Language English
- Illustrations XXIX, 316 p. 141 illus., 3 illus. in color. Illustrations, black & white 0
Categories
Long description:
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
MoreTable of Contents:
Silicon Anodization: State of the Art.- Experimental, Characterization and Simulation Methods.- Microscale Study of Anodization Process.- Anodization Process as a Structuring Technique: Experiments and Simulation.
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