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Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 1

Introduction to Vacuum and Systems
 
Kiadó: Elsevier
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Hosszú leírás:
Fundamentals of Vacuum Science and System Design for High and Ultra-High Vacuum, Volume 1: Introduction to Vacuum and Systems details the important practical considerations in design of vacuum systems for various vacuum deposition technologies. Topics covered include: Introduction to vaccum and end uses, molecular density in vacuum, molecular flow in various vacuum regimes, characteristics of gas composition at various molecular densities, general principles of gas-solid interactions, vacuum pump technology, pressure sensors, leak detection and the impact of fundamental design decisions and operating practices on vacuum system performance. The introductory sections are designed to introduce the reader to basic concepts in vacuum technology. More detailed sections provide fundamental descriptions of basic vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach. System design, assembly, maintenance, and trouble-shooting are reviewed in detail. This volume also describes a wide range of pressure measurement approaches, and includes several key characterization techniques, example applications on systems for rough vacuum, high vacuum and ultra-high vacuum, as well as trade-offs in system design, allowing for the reader to develop an understanding of all the elements required for a successfully designed, assembled, and operating system.


  • Covers vacuum pump technology, taking a system from atmosphere down to high or ultra-high vacuum
  • Discusses the fundamental descriptions of vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach
  • Provides an overview of practical vacuum system operating techniques that will ensure optimal performance and troubleshooting methods to identify system deficiencies
Tartalomjegyzék:
SECTION 1 Fundamentals of Vacuum Science
1. Introduction and Background
2. Developing an Understanding of Pressure and Vacuum
3. An Overview of Vacuum Systems
4. The Importance of Vacuum 5. The Movement of Gases in Vacuum Systems

SECTION 2 System Design for Deposition Processes
6. Materials and an Introduction to Vacuum System Design
7. Passive Components Used in Vacuum System Design
8. Production and Measurement of Vacuum: The Active Components of Vacuum Systems
9. System Considerations Based on Deposition Process
10. System Cleanliness
11. Testing and Modelling
12. Safety and Practical Considerations
13. Putting It All Together

SECTION 3 Appendices
14. Charts and tools for: Unit conversions, pump selection, gauge selection materials requirements, etc.
15. Residual gas analysis
16. Equilibrium vapor pressure
17. Material deposition chart
18. Molecular density and pressure