Mega-Bit Memory Technology - From Mega-Bit to Giga-Bit
From Mega-Bit to Giga-Bit
Series: Japanese Technology Reviews S.; v.32.;
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Estimated delivery time: In stock at the publisher, but not at Prospero's office. Delivery time approx. 3-5 weeks.
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Product details:
- Edition number 1
- Publisher CRC Press
- Date of Publication 26 November 1998
- ISBN 9789056990985
- Binding Paperback
- No. of pages293 pages
- Size 216x138 mm
- Weight 480 g
- Language English 0
Categories
Short description:
This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies&&&8212;the longstanding technology driver of Si ULSI&&&8212;as they advance from the 1 Kbit to the Gbit DRAM era.
MoreLong description:
This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies&&&8212;the longstanding technology driver of Si ULSI&&&8212;as they advance from the 1 Kbit to the Gbit DRAM era.
MoreTable of Contents:
1. Memory Cell 2. Dry Etching 3. Thin Film Insulator 4. Impurity Doping 5. Metalization 6. Crystal Technology 7.
SOI Device Technology 8. Lithography 9. Chemical Vapor Deposition 10. Process and Device Simulation
