Magneto?Lithography by Naaman, Ron; Bardea, Amos;

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Product details:

Publisher Wiley VCH
Date of Publication 2 June 2025

ISBN 9783527410071
Binding Hardback
No. of pages320 pages
Size 240x170 mm
Language English

Short description:

? The unique work on a new nanostructuring technique

? Discusses in context with other methods

? Method suitable for sub 100?nm structures

? Includes chemical patterning and metal deposition, also on non?planar surfaces

? Covers many applications, like microelectronics and lab?on?a?chip.

Long description:

Meeting the need for a book that conveys the knowledge in a coherent fashion, this work introduces the principles and applications of magnetolithography and discusses it within the context of more established methods. As such, it includes chemical patterning and metal deposition, also on non?planar surfaces, while covering many applications, such as microelectronics and lab?on?a?chip.

The result is a balanced discussion of all the available methods together with their advantages and shortcomings for surface physicists, materials scientists, electrical engineers, and those working in the semiconductor industry.