Magneto?Lithography
Publisher: Wiley VCH
Date of Publication: 15 May 2024
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Product details:
| ISBN13: | 9783527410071 |
| ISBN10: | 3527410074 |
| Binding: | Hardback |
| No. of pages: | 320 pages |
| Size: | 240x170 mm |
| Language: | English |
| 700 |
Category:
Short description:
? The unique work on a new nanostructuring technique
? The unique work on a new nanostructuring technique
? Discusses in context with other methods
? Method suitable for sub 100?nm structures
? Includes chemical patterning and metal deposition, also on non?planar surfaces
? Covers many applications, like microelectronics and lab?on?a?chip.
Long description:
Meeting the need for a book that conveys the knowledge in a coherent fashion, this work introduces the principles and applications of magnetolithography and discusses it within the context of more established methods. As such, it includes chemical patterning and metal deposition, also on non?planar surfaces, while covering many applications, such as microelectronics and lab?on?a?chip.
The result is a balanced discussion of all the available methods together with their advantages and shortcomings for surface physicists, materials scientists, electrical engineers, and those working in the semiconductor industry.
The result is a balanced discussion of all the available methods together with their advantages and shortcomings for surface physicists, materials scientists, electrical engineers, and those working in the semiconductor industry.
Table of Contents:
The concepts of Magnetolihography
Chemical and biochemical patterning
Metal deposition and etching
Patterning magnetic surfaces
Lab on Chip (LOC) and microfluidity
Chemical and biochemical patterning
Metal deposition and etching
Patterning magnetic surfaces
Lab on Chip (LOC) and microfluidity